VOICE COIL LEAF SPRING PROBER

Aspects of the present disclosure describe a voice coil actuated leaf spring prober that advantageously may be operated to probe every individual device (device under test - DUT) comprising a contemporary wafer. The prober according to aspects of the present disclosure includes one or more probe nee...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHERNYAKOV, Alex, VANDERWERF, Timothy
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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