SURFACE OBSERVATION METHOD

This surface observation method comprises a step a) and a step b). In the step a), materials including one or more kinds of solid light-emitting dye molecules are accumulated in a region, of a substrate or a structure on the substrate, having an abnormal shape. In the step b), a fluorescent image of...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OOWADA, Shin, ASAKO, Ryuichi, YUHARA, Kazuhiro, SHIMURA, Satoru, ITO, Shunichiro, CHUJO, Yoshiki, TANAKA, Kazuo
Format: Patent
Sprache:eng ; fre ; jpn
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