SURFACE OBSERVATION METHOD

This surface observation method comprises a step a) and a step b). In the step a), materials including one or more kinds of solid light-emitting dye molecules are accumulated in a region, of a substrate or a structure on the substrate, having an abnormal shape. In the step b), a fluorescent image of...

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Hauptverfasser: OOWADA, Shin, ASAKO, Ryuichi, YUHARA, Kazuhiro, SHIMURA, Satoru, ITO, Shunichiro, CHUJO, Yoshiki, TANAKA, Kazuo
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creator OOWADA, Shin
ASAKO, Ryuichi
YUHARA, Kazuhiro
SHIMURA, Satoru
ITO, Shunichiro
CHUJO, Yoshiki
TANAKA, Kazuo
description This surface observation method comprises a step a) and a step b). In the step a), materials including one or more kinds of solid light-emitting dye molecules are accumulated in a region, of a substrate or a structure on the substrate, having an abnormal shape. In the step b), a fluorescent image of the solid light-emitting dye molecules is acquired by applying illumination light to the region, of the substrate or the structure on the substrate, having the abnormal shape. Le présent procédé d'observation de surface comprend une étape a) et une étape b). Dans l'étape a), des matériaux comprenant un ou plusieurs types de molécules de colorant solide émettant de la lumière sont accumulés dans une région d'un substrat ou d'une structure sur le substrat qui présente une forme anormale. Dans l'étape b), une image fluorescente des molécules de colorant solide émettant de la lumière est acquise en appliquant une lumière d'éclairage sur la région du substrat ou de la structure sur le substrat qui a la forme anormale. 表面観測方法は、工程a)および工程b)を含む。工程a)では、基板または基板上の構造物における異常形状の領域に、少なくとも1種類以上の固体発光性色素分子を含む材料を集積させる。工程b)では、基板または基板上の構造物における異常形状の領域に照明光を照射し、固体発光性色素分子の蛍光像を取得する。
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In the step a), materials including one or more kinds of solid light-emitting dye molecules are accumulated in a region, of a substrate or a structure on the substrate, having an abnormal shape. In the step b), a fluorescent image of the solid light-emitting dye molecules is acquired by applying illumination light to the region, of the substrate or the structure on the substrate, having the abnormal shape. Le présent procédé d'observation de surface comprend une étape a) et une étape b). Dans l'étape a), des matériaux comprenant un ou plusieurs types de molécules de colorant solide émettant de la lumière sont accumulés dans une région d'un substrat ou d'une structure sur le substrat qui présente une forme anormale. 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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MATERIALS THEREFOR
MEASURING
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
title SURFACE OBSERVATION METHOD
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