NANOMECHANICAL MASS FLOW METER AND CONTROLLER DEVICE, METHOD, AND ASSOCIATED USES THEREOF

The present invention relates to a nanomechanical mass flow meter and controller device for open nanofluidic systems. Said device is based on the integration of semiconductor nanowires, either as open nanofluidic channels or as mass flow meters. Thanks to this configuration, the flow of conducting l...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ESCOBAR ALCÓN, Javier Enrique, CALLEJA GÓMEZ, Montserrat, GIL SANTOS, Eduardo, MONTEIRO KOSAKA, Priscila, TAMAYO DE MIGUEL, Francisco Javier, MOLINA FERNÁNDEZ, Juan, RUZ MARTÍNEZ, Jose Jaime, SAN PAULO HERNANDO, Alvaro, MALVAR VIDAL, Oscar
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS TESTING THEIR RELEVANT APPARATUS TRANSPORTING
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