POSITIONING JIG

A positioning jig, which is used for assisting in mounting positioning pins on a chuck. The positioning jig comprises: a body (21), which comprises a first surface (211) and a second surface (212) arranged opposite each other in a first direction (X), a third surface (213) connected between the firs...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	LI, Baichun, QI, Feng, ZHOU, Zhixiao
Format:	Patent
Sprache:	chi ; eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	A positioning jig, which is used for assisting in mounting positioning pins on a chuck. The positioning jig comprises: a body (21), which comprises a first surface (211) and a second surface (212) arranged opposite each other in a first direction (X), a third surface (213) connected between the first surface (211) and the second surface (212), and positioning holes (22) penetrating the first surface (211) and extending in the first direction (X), wherein the positioning holes (22) are used for accommodating at least a portion of the positioning pins, and the plurality of positioning holes (22) are arranged at intervals along a circular track in a uniform manner; an avoidance portion (23), which is formed by means of part of the third surface (213) being recessed towards the interior of the body (21), wherein the avoidance portion (23) penetrates the first surface (211) and the second surface (212) in the first direction (X); and a supporting portion (24), which is connected to the second surface (212) and is