DEPOSITION APPARATUS
A mask comprises: a body which has a length extended in a first direction, and in which defined are a plurality of first cell regions arranged in the first direction, each including a plurality of first holes, and a plurality of second cell regions arranged in the first direction, each including a p...
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| creator | RYU, Sukha KO, Junhyeuk YI, Sang Min KIM, Jongbum CHUNG, Kyunghoon KANG, Mingoo KIM, Euigyu |
| description | A mask comprises: a body which has a length extended in a first direction, and in which defined are a plurality of first cell regions arranged in the first direction, each including a plurality of first holes, and a plurality of second cell regions arranged in the first direction, each including a plurality of second holes; and clamping parts which protrude from the body in the first direction and which are integrated with the body, wherein alignment marks that do not overlap with the first holes and the second holes are defined on the body, and when viewing the mask in a second direction intersecting with the first direction, the alignment marks overlap with each of the first and second cell regions.
L'invention concerne un masque comprenant : un corps qui a une longueur s'étendant dans une première direction, et dans lequel sont définies plusieurs premières régions de cellules agencées dans la première direction, comprenant chacune plusieurs premiers trous, et plusieurs secondes régions de cellules agencées dans la première direction, comprenant chacune plusieurs seconds trous ; et des parties de serrage qui font saillie à partir du corps dans la première direction et qui sont intégrées au corps, des marques d'alignement qui ne chevauchent pas les premiers trous et les seconds trous étant définies sur le corps, et, lors de l'observation du masque dans une seconde direction coupant la première direction, les marques d'alignement chevauchant chacune des premières et secondes régions de cellules.
마스크는 제1 방향을 따라 연장된 길이를 갖고, 상기 제1 방향을 따라 배열되고 각각이 복수의 제1 홀들을 포함하는 복수의 제1 셀 영역들 및 각각이 복수의 제2 홀들을 포함하는 복수의 제2 셀 영역들이 정의된 몸체, 및 상기 제1 방향을 따라 상기 몸체로부터 돌출되고 상기 몸체와 일체의 형상을 이루는 클램핑부를 포함하고, 상기 몸체에는 상기 제1 홀들 및 상기 제2 홀들과 비 중첩하는 정렬 마크가 정의되고, 상기 정렬 마크는 상기 제1 방향과 교차하는 제2 방향에서 볼 때 상기 제1 및 제2 셀 영역들 각각에 중첩한다. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_WO2024048954A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>WO2024048954A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_WO2024048954A13</originalsourceid><addsrcrecordid>eNrjZBBxcQ3wD_YM8fT3U3AMCHAMcgwJDeZhYE1LzClO5YXS3AzKbq4hzh66qQX58anFBYnJqXmpJfHh_kYGRiYGJhaWpiaOhsbEqQIACOcfxg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>DEPOSITION APPARATUS</title><source>esp@cenet</source><creator>RYU, Sukha ; KO, Junhyeuk ; YI, Sang Min ; KIM, Jongbum ; CHUNG, Kyunghoon ; KANG, Mingoo ; KIM, Euigyu</creator><creatorcontrib>RYU, Sukha ; KO, Junhyeuk ; YI, Sang Min ; KIM, Jongbum ; CHUNG, Kyunghoon ; KANG, Mingoo ; KIM, Euigyu</creatorcontrib><description>A mask comprises: a body which has a length extended in a first direction, and in which defined are a plurality of first cell regions arranged in the first direction, each including a plurality of first holes, and a plurality of second cell regions arranged in the first direction, each including a plurality of second holes; and clamping parts which protrude from the body in the first direction and which are integrated with the body, wherein alignment marks that do not overlap with the first holes and the second holes are defined on the body, and when viewing the mask in a second direction intersecting with the first direction, the alignment marks overlap with each of the first and second cell regions.
L'invention concerne un masque comprenant : un corps qui a une longueur s'étendant dans une première direction, et dans lequel sont définies plusieurs premières régions de cellules agencées dans la première direction, comprenant chacune plusieurs premiers trous, et plusieurs secondes régions de cellules agencées dans la première direction, comprenant chacune plusieurs seconds trous ; et des parties de serrage qui font saillie à partir du corps dans la première direction et qui sont intégrées au corps, des marques d'alignement qui ne chevauchent pas les premiers trous et les seconds trous étant définies sur le corps, et, lors de l'observation du masque dans une seconde direction coupant la première direction, les marques d'alignement chevauchant chacune des premières et secondes régions de cellules.
마스크는 제1 방향을 따라 연장된 길이를 갖고, 상기 제1 방향을 따라 배열되고 각각이 복수의 제1 홀들을 포함하는 복수의 제1 셀 영역들 및 각각이 복수의 제2 홀들을 포함하는 복수의 제2 셀 영역들이 정의된 몸체, 및 상기 제1 방향을 따라 상기 몸체로부터 돌출되고 상기 몸체와 일체의 형상을 이루는 클램핑부를 포함하고, 상기 몸체에는 상기 제1 홀들 및 상기 제2 홀들과 비 중첩하는 정렬 마크가 정의되고, 상기 정렬 마크는 상기 제1 방향과 교차하는 제2 방향에서 볼 때 상기 제1 및 제2 셀 영역들 각각에 중첩한다.</description><language>eng ; fre ; kor</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240307&DB=EPODOC&CC=WO&NR=2024048954A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240307&DB=EPODOC&CC=WO&NR=2024048954A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>RYU, Sukha</creatorcontrib><creatorcontrib>KO, Junhyeuk</creatorcontrib><creatorcontrib>YI, Sang Min</creatorcontrib><creatorcontrib>KIM, Jongbum</creatorcontrib><creatorcontrib>CHUNG, Kyunghoon</creatorcontrib><creatorcontrib>KANG, Mingoo</creatorcontrib><creatorcontrib>KIM, Euigyu</creatorcontrib><title>DEPOSITION APPARATUS</title><description>A mask comprises: a body which has a length extended in a first direction, and in which defined are a plurality of first cell regions arranged in the first direction, each including a plurality of first holes, and a plurality of second cell regions arranged in the first direction, each including a plurality of second holes; and clamping parts which protrude from the body in the first direction and which are integrated with the body, wherein alignment marks that do not overlap with the first holes and the second holes are defined on the body, and when viewing the mask in a second direction intersecting with the first direction, the alignment marks overlap with each of the first and second cell regions.
L'invention concerne un masque comprenant : un corps qui a une longueur s'étendant dans une première direction, et dans lequel sont définies plusieurs premières régions de cellules agencées dans la première direction, comprenant chacune plusieurs premiers trous, et plusieurs secondes régions de cellules agencées dans la première direction, comprenant chacune plusieurs seconds trous ; et des parties de serrage qui font saillie à partir du corps dans la première direction et qui sont intégrées au corps, des marques d'alignement qui ne chevauchent pas les premiers trous et les seconds trous étant définies sur le corps, et, lors de l'observation du masque dans une seconde direction coupant la première direction, les marques d'alignement chevauchant chacune des premières et secondes régions de cellules.
마스크는 제1 방향을 따라 연장된 길이를 갖고, 상기 제1 방향을 따라 배열되고 각각이 복수의 제1 홀들을 포함하는 복수의 제1 셀 영역들 및 각각이 복수의 제2 홀들을 포함하는 복수의 제2 셀 영역들이 정의된 몸체, 및 상기 제1 방향을 따라 상기 몸체로부터 돌출되고 상기 몸체와 일체의 형상을 이루는 클램핑부를 포함하고, 상기 몸체에는 상기 제1 홀들 및 상기 제2 홀들과 비 중첩하는 정렬 마크가 정의되고, 상기 정렬 마크는 상기 제1 방향과 교차하는 제2 방향에서 볼 때 상기 제1 및 제2 셀 영역들 각각에 중첩한다.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBBxcQ3wD_YM8fT3U3AMCHAMcgwJDeZhYE1LzClO5YXS3AzKbq4hzh66qQX58anFBYnJqXmpJfHh_kYGRiYGJhaWpiaOhsbEqQIACOcfxg</recordid><startdate>20240307</startdate><enddate>20240307</enddate><creator>RYU, Sukha</creator><creator>KO, Junhyeuk</creator><creator>YI, Sang Min</creator><creator>KIM, Jongbum</creator><creator>CHUNG, Kyunghoon</creator><creator>KANG, Mingoo</creator><creator>KIM, Euigyu</creator><scope>EVB</scope></search><sort><creationdate>20240307</creationdate><title>DEPOSITION APPARATUS</title><author>RYU, Sukha ; KO, Junhyeuk ; YI, Sang Min ; KIM, Jongbum ; CHUNG, Kyunghoon ; KANG, Mingoo ; KIM, Euigyu</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2024048954A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; kor</language><creationdate>2024</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>RYU, Sukha</creatorcontrib><creatorcontrib>KO, Junhyeuk</creatorcontrib><creatorcontrib>YI, Sang Min</creatorcontrib><creatorcontrib>KIM, Jongbum</creatorcontrib><creatorcontrib>CHUNG, Kyunghoon</creatorcontrib><creatorcontrib>KANG, Mingoo</creatorcontrib><creatorcontrib>KIM, Euigyu</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>RYU, Sukha</au><au>KO, Junhyeuk</au><au>YI, Sang Min</au><au>KIM, Jongbum</au><au>CHUNG, Kyunghoon</au><au>KANG, Mingoo</au><au>KIM, Euigyu</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>DEPOSITION APPARATUS</title><date>2024-03-07</date><risdate>2024</risdate><abstract>A mask comprises: a body which has a length extended in a first direction, and in which defined are a plurality of first cell regions arranged in the first direction, each including a plurality of first holes, and a plurality of second cell regions arranged in the first direction, each including a plurality of second holes; and clamping parts which protrude from the body in the first direction and which are integrated with the body, wherein alignment marks that do not overlap with the first holes and the second holes are defined on the body, and when viewing the mask in a second direction intersecting with the first direction, the alignment marks overlap with each of the first and second cell regions.
L'invention concerne un masque comprenant : un corps qui a une longueur s'étendant dans une première direction, et dans lequel sont définies plusieurs premières régions de cellules agencées dans la première direction, comprenant chacune plusieurs premiers trous, et plusieurs secondes régions de cellules agencées dans la première direction, comprenant chacune plusieurs seconds trous ; et des parties de serrage qui font saillie à partir du corps dans la première direction et qui sont intégrées au corps, des marques d'alignement qui ne chevauchent pas les premiers trous et les seconds trous étant définies sur le corps, et, lors de l'observation du masque dans une seconde direction coupant la première direction, les marques d'alignement chevauchant chacune des premières et secondes régions de cellules.
마스크는 제1 방향을 따라 연장된 길이를 갖고, 상기 제1 방향을 따라 배열되고 각각이 복수의 제1 홀들을 포함하는 복수의 제1 셀 영역들 및 각각이 복수의 제2 홀들을 포함하는 복수의 제2 셀 영역들이 정의된 몸체, 및 상기 제1 방향을 따라 상기 몸체로부터 돌출되고 상기 몸체와 일체의 형상을 이루는 클램핑부를 포함하고, 상기 몸체에는 상기 제1 홀들 및 상기 제2 홀들과 비 중첩하는 정렬 마크가 정의되고, 상기 정렬 마크는 상기 제1 방향과 교차하는 제2 방향에서 볼 때 상기 제1 및 제2 셀 영역들 각각에 중첩한다.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | DEPOSITION APPARATUS |
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