PARASITIC PLASMA SUPPRESSOR

A parasitic plasma suppressor configured to suppress (or at least reduce) the generation of parasitic plasma outside an intended region, such as suppress the generation of parasitic plasma in areas adjacent a pedestal in a processing chamber of a plasma-enhanced processing system. L'invention c...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BABBAR, Yogesh, JAFARIAN-TEHRANI, Sam, CHENG, Weifeng, MARTIN, Keith Joseph, BRENINGER, Andrew H, FRENCH, David, SAKIYAMA, Yukinori, BAILEY, Curtis W
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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