INTERCONNECTION STRUCTURE IMPEDANCE MEASUREMENT CIRCUIT AND MEASUREMENT APPARATUS, AND MEASUREMENT METHOD

An interconnection structure impedance measurement circuit. A Wheatstone bridge structure is optimized, and three branches connected in parallel are used, wherein interconnection structures to be measured in one branch are connected in series, and two resistors in the other two branches are connecte...

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Bibliographische Detailangaben

Hauptverfasser:	SUN, Niuyi, SUN, Tuobei, MEI, Na, WU, Xiaopeng, YANG, Dan
Format:	Patent
Sprache:	chi ; eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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