INTERCONNECTION STRUCTURE IMPEDANCE MEASUREMENT CIRCUIT AND MEASUREMENT APPARATUS, AND MEASUREMENT METHOD

An interconnection structure impedance measurement circuit. A Wheatstone bridge structure is optimized, and three branches connected in parallel are used, wherein interconnection structures to be measured in one branch are connected in series, and two resistors in the other two branches are connecte...

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Hauptverfasser: SUN, Niuyi, SUN, Tuobei, MEI, Na, WU, Xiaopeng, YANG, Dan
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creator SUN, Niuyi
SUN, Tuobei
MEI, Na
WU, Xiaopeng
YANG, Dan
description An interconnection structure impedance measurement circuit. A Wheatstone bridge structure is optimized, and three branches connected in parallel are used, wherein interconnection structures to be measured in one branch are connected in series, and two resistors in the other two branches are connected in series. The branch of the interconnection structures and one of the other two branches are controlled to be simultaneously turned on, the voltage between the two branches that are turned on is measured, and the impedance of two interconnection structures is calculated according to a current introduced into the interconnection structure impedance measurement circuit, the measured voltage, and the resistance of the branches. According to the technical solution, the impedance of the interconnection structures can be conveniently and accurately measured in a large scale, and the impedance of a single interconnection structure in a reliability experiment can be accurately monitored in real time. Further provided ar
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A Wheatstone bridge structure is optimized, and three branches connected in parallel are used, wherein interconnection structures to be measured in one branch are connected in series, and two resistors in the other two branches are connected in series. The branch of the interconnection structures and one of the other two branches are controlled to be simultaneously turned on, the voltage between the two branches that are turned on is measured, and the impedance of two interconnection structures is calculated according to a current introduced into the interconnection structure impedance measurement circuit, the measured voltage, and the resistance of the branches. According to the technical solution, the impedance of the interconnection structures can be conveniently and accurately measured in a large scale, and the impedance of a single interconnection structure in a reliability experiment can be accurately monitored in real time. 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A Wheatstone bridge structure is optimized, and three branches connected in parallel are used, wherein interconnection structures to be measured in one branch are connected in series, and two resistors in the other two branches are connected in series. The branch of the interconnection structures and one of the other two branches are controlled to be simultaneously turned on, the voltage between the two branches that are turned on is measured, and the impedance of two interconnection structures is calculated according to a current introduced into the interconnection structure impedance measurement circuit, the measured voltage, and the resistance of the branches. According to the technical solution, the impedance of the interconnection structures can be conveniently and accurately measured in a large scale, and the impedance of a single interconnection structure in a reliability experiment can be accurately monitored in real time. 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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
title INTERCONNECTION STRUCTURE IMPEDANCE MEASUREMENT CIRCUIT AND MEASUREMENT APPARATUS, AND MEASUREMENT METHOD
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