PRODUCTION MANAGEMENT CONTROL SYSTEM FOR ELECTRONIC-GRADE HYDROFLUORIC ACID PREPARATION AND CONTROL METHOD THEREOF

A production management control system for electronic-grade hydrofluoric acid preparation and a control method thereof, which use a monitoring technology based on artificial intelligence, and ensure a preparation yield of a final electronic-grade hydrofluoric acid product by monitoring various param...

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Bibliographische Detailangaben
Hauptverfasser: LEI, Yousheng, QIU, Hanlin, HUANG, Mingxin, LIAO, Honghui, QIU, Zanwen, QIU, Tianming, ZHENG, Hongshen
Format: Patent
Sprache:chi ; eng ; fre
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