REPLACEMENT SIGNALING SEAL

A seal for a substrate processing system includes a body comprised of a base material, an outer surface, and a marker material disposed at least one of throughout the base material within the body of the seal, in an outer edge region of the seal, in a coating disposed on the outer surface of the sea...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TUCKER, Jeremy, HAUSMANN, Dennis, LEESER, Karl Frederick
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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