COMMUNICATION NODE TO INTERFACE BETWEEN EVALUATION SYSTEMS AND A MANUFACTURING SYSTEM
An electronic device manufacturing system that includes a process tool and a tool server coupled to the process tool and comprising a communication node and an evaluation system. The communication node is configured to obtain one or more attributes from an evaluation system and provide a monitoring...
Gespeichert in:
| Hauptverfasser: | , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng ; fre |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | KRIL, Thorsten NAGENDRA, Hemanth Konanur SASAN, Jatinder HOWELLS, Michael |
| description | An electronic device manufacturing system that includes a process tool and a tool server coupled to the process tool and comprising a communication node and an evaluation system. The communication node is configured to obtain one or more attributes from an evaluation system and provide a monitoring device comprising a data collection plan that is based on the one or more attributes. The communication node is further configured to register the monitoring device with a process tool. The communication node is further configured to receive, from the process tool, data based on the data collection plan and send the received data to the evaluation system.
L'invention concerne un système de fabrication de dispositif électronique qui comprend un outil de traitement et un serveur d'outil couplé à l'outil de traitement et comprenant un nœud de communication et un système d'évaluation. Le nœud de communication est configuré pour obtenir un ou plusieurs attributs à partir d'un système d'évaluation et fournir un dispositif de surveillance comprenant un plan de collecte de données qui est basé sur le ou les attributs. Le nœud de communication est en outre configuré pour enregistrer le dispositif de surveillance avec un outil de traitement. Le nœud de communication est en outre configuré pour recevoir, en provenance de l'outil de traitement, des données sur la base du plan de collecte de données et envoyer les données reçues au système d'évaluation. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_WO2023177746A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>WO2023177746A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_WO2023177746A13</originalsourceid><addsrcrecordid>eNqNyrEKwjAQgOEsDqK-w4GzYFsx85leNWAu0FwsTqVInEQL9f1pwT6A0z_831JF452LbA2K9QzsSwLxYFmortAQnEgaIga64TX-ULgHIRcAuQQEhxwnKbG2fJ7fWi2e3WtIm7krta1IzGWX-k-bhr57pHf6to3P93mRaa0PR8yK_9QISAMxsQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>COMMUNICATION NODE TO INTERFACE BETWEEN EVALUATION SYSTEMS AND A MANUFACTURING SYSTEM</title><source>esp@cenet</source><creator>KRIL, Thorsten ; NAGENDRA, Hemanth Konanur ; SASAN, Jatinder ; HOWELLS, Michael</creator><creatorcontrib>KRIL, Thorsten ; NAGENDRA, Hemanth Konanur ; SASAN, Jatinder ; HOWELLS, Michael</creatorcontrib><description>An electronic device manufacturing system that includes a process tool and a tool server coupled to the process tool and comprising a communication node and an evaluation system. The communication node is configured to obtain one or more attributes from an evaluation system and provide a monitoring device comprising a data collection plan that is based on the one or more attributes. The communication node is further configured to register the monitoring device with a process tool. The communication node is further configured to receive, from the process tool, data based on the data collection plan and send the received data to the evaluation system.
L'invention concerne un système de fabrication de dispositif électronique qui comprend un outil de traitement et un serveur d'outil couplé à l'outil de traitement et comprenant un nœud de communication et un système d'évaluation. Le nœud de communication est configuré pour obtenir un ou plusieurs attributs à partir d'un système d'évaluation et fournir un dispositif de surveillance comprenant un plan de collecte de données qui est basé sur le ou les attributs. Le nœud de communication est en outre configuré pour enregistrer le dispositif de surveillance avec un outil de traitement. Le nœud de communication est en outre configuré pour recevoir, en provenance de l'outil de traitement, des données sur la base du plan de collecte de données et envoyer les données reçues au système d'évaluation.</description><language>eng ; fre</language><subject>BASIC ELECTRIC ELEMENTS ; CALCULATING ; COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS ; COMPUTING ; CONTROL OR REGULATING SYSTEMS IN GENERAL ; CONTROLLING ; COUNTING ; ELECTRIC COMMUNICATION TECHNIQUE ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS ; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS ; PHYSICS ; REGULATING ; SEMICONDUCTOR DEVICES ; TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHICCOMMUNICATION</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230921&DB=EPODOC&CC=WO&NR=2023177746A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230921&DB=EPODOC&CC=WO&NR=2023177746A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KRIL, Thorsten</creatorcontrib><creatorcontrib>NAGENDRA, Hemanth Konanur</creatorcontrib><creatorcontrib>SASAN, Jatinder</creatorcontrib><creatorcontrib>HOWELLS, Michael</creatorcontrib><title>COMMUNICATION NODE TO INTERFACE BETWEEN EVALUATION SYSTEMS AND A MANUFACTURING SYSTEM</title><description>An electronic device manufacturing system that includes a process tool and a tool server coupled to the process tool and comprising a communication node and an evaluation system. The communication node is configured to obtain one or more attributes from an evaluation system and provide a monitoring device comprising a data collection plan that is based on the one or more attributes. The communication node is further configured to register the monitoring device with a process tool. The communication node is further configured to receive, from the process tool, data based on the data collection plan and send the received data to the evaluation system.
L'invention concerne un système de fabrication de dispositif électronique qui comprend un outil de traitement et un serveur d'outil couplé à l'outil de traitement et comprenant un nœud de communication et un système d'évaluation. Le nœud de communication est configuré pour obtenir un ou plusieurs attributs à partir d'un système d'évaluation et fournir un dispositif de surveillance comprenant un plan de collecte de données qui est basé sur le ou les attributs. Le nœud de communication est en outre configuré pour enregistrer le dispositif de surveillance avec un outil de traitement. Le nœud de communication est en outre configuré pour recevoir, en provenance de l'outil de traitement, des données sur la base du plan de collecte de données et envoyer les données reçues au système d'évaluation.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CALCULATING</subject><subject>COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS</subject><subject>COMPUTING</subject><subject>CONTROL OR REGULATING SYSTEMS IN GENERAL</subject><subject>CONTROLLING</subject><subject>COUNTING</subject><subject>ELECTRIC COMMUNICATION TECHNIQUE</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</subject><subject>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</subject><subject>PHYSICS</subject><subject>REGULATING</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHICCOMMUNICATION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyrEKwjAQgOEsDqK-w4GzYFsx85leNWAu0FwsTqVInEQL9f1pwT6A0z_831JF452LbA2K9QzsSwLxYFmortAQnEgaIga64TX-ULgHIRcAuQQEhxwnKbG2fJ7fWi2e3WtIm7krta1IzGWX-k-bhr57pHf6to3P93mRaa0PR8yK_9QISAMxsQ</recordid><startdate>20230921</startdate><enddate>20230921</enddate><creator>KRIL, Thorsten</creator><creator>NAGENDRA, Hemanth Konanur</creator><creator>SASAN, Jatinder</creator><creator>HOWELLS, Michael</creator><scope>EVB</scope></search><sort><creationdate>20230921</creationdate><title>COMMUNICATION NODE TO INTERFACE BETWEEN EVALUATION SYSTEMS AND A MANUFACTURING SYSTEM</title><author>KRIL, Thorsten ; NAGENDRA, Hemanth Konanur ; SASAN, Jatinder ; HOWELLS, Michael</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2023177746A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CALCULATING</topic><topic>COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS</topic><topic>COMPUTING</topic><topic>CONTROL OR REGULATING SYSTEMS IN GENERAL</topic><topic>CONTROLLING</topic><topic>COUNTING</topic><topic>ELECTRIC COMMUNICATION TECHNIQUE</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</topic><topic>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</topic><topic>PHYSICS</topic><topic>REGULATING</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHICCOMMUNICATION</topic><toplevel>online_resources</toplevel><creatorcontrib>KRIL, Thorsten</creatorcontrib><creatorcontrib>NAGENDRA, Hemanth Konanur</creatorcontrib><creatorcontrib>SASAN, Jatinder</creatorcontrib><creatorcontrib>HOWELLS, Michael</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KRIL, Thorsten</au><au>NAGENDRA, Hemanth Konanur</au><au>SASAN, Jatinder</au><au>HOWELLS, Michael</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>COMMUNICATION NODE TO INTERFACE BETWEEN EVALUATION SYSTEMS AND A MANUFACTURING SYSTEM</title><date>2023-09-21</date><risdate>2023</risdate><abstract>An electronic device manufacturing system that includes a process tool and a tool server coupled to the process tool and comprising a communication node and an evaluation system. The communication node is configured to obtain one or more attributes from an evaluation system and provide a monitoring device comprising a data collection plan that is based on the one or more attributes. The communication node is further configured to register the monitoring device with a process tool. The communication node is further configured to receive, from the process tool, data based on the data collection plan and send the received data to the evaluation system.
L'invention concerne un système de fabrication de dispositif électronique qui comprend un outil de traitement et un serveur d'outil couplé à l'outil de traitement et comprenant un nœud de communication et un système d'évaluation. Le nœud de communication est configuré pour obtenir un ou plusieurs attributs à partir d'un système d'évaluation et fournir un dispositif de surveillance comprenant un plan de collecte de données qui est basé sur le ou les attributs. Le nœud de communication est en outre configuré pour enregistrer le dispositif de surveillance avec un outil de traitement. Le nœud de communication est en outre configuré pour recevoir, en provenance de l'outil de traitement, des données sur la base du plan de collecte de données et envoyer les données reçues au système d'évaluation.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng ; fre |
| recordid | cdi_epo_espacenet_WO2023177746A1 |
| source | esp@cenet |
| subjects | BASIC ELECTRIC ELEMENTS CALCULATING COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING COUNTING ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHICCOMMUNICATION |
| title | COMMUNICATION NODE TO INTERFACE BETWEEN EVALUATION SYSTEMS AND A MANUFACTURING SYSTEM |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-24T07%3A33%3A45IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=KRIL,%20Thorsten&rft.date=2023-09-21&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EWO2023177746A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |