FACTORY INTERFACE ROBOTS USABLE WITH INTEGRATED LOAD LOCKS

A factory interface for an electronic device manufacturing system can include a load lock disposed within the interior volume of a factory interface and a factory interface robot disposed within the interior volume of the factory interface. The factory interface robot can be configured to transfer s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ASSAF, Shay, HOLEYANNAVAR, Devendra Channappa, BAUMGARTEN, Douglas B, REUTER, Paul B, CONSTANT, Andrew J, RAMACHANDRAN, Narayanan, PHILLIPS, David, NEWMAN, Jacob, RICE, Michael R, GOPALAKRISHNA, Srinivas Poshatrahalli, KOSHTI, Sushant S, RAMACHANDRAIAH, Arunkumar
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING
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