FACTORY INTERFACE ROBOTS USABLE WITH INTEGRATED LOAD LOCKS
A factory interface for an electronic device manufacturing system can include a load lock disposed within the interior volume of a factory interface and a factory interface robot disposed within the interior volume of the factory interface. The factory interface robot can be configured to transfer s...
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| creator | ASSAF, Shay HOLEYANNAVAR, Devendra Channappa BAUMGARTEN, Douglas B REUTER, Paul B CONSTANT, Andrew J RAMACHANDRAN, Narayanan PHILLIPS, David NEWMAN, Jacob RICE, Michael R GOPALAKRISHNA, Srinivas Poshatrahalli KOSHTI, Sushant S RAMACHANDRAIAH, Arunkumar |
| description | A factory interface for an electronic device manufacturing system can include a load lock disposed within the interior volume of a factory interface and a factory interface robot disposed within the interior volume of the factory interface. The factory interface robot can be configured to transfer substrates between a first set of substrate carriers and the first load lock. The factory interface robot can comprise a vertical tower, a plurality of links, and an end effector.
Une interface usine pour un système de fabrication de dispositif électronique peut comprendre un verrou de charge disposé à l'intérieur du volume intérieur d'une interface d'usine et un robot d'interface usine disposé à l'intérieur du volume intérieur de l'interface usine. Le robot d'interface usine peut être conçu pour transférer des substrats entre un premier ensemble de supports de substrat et le premier verrou de charge. Le robot d'interface usine peut comprendre une tour verticale, une pluralité de liaisons et un effecteur terminal. |
| format | Patent |
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Une interface usine pour un système de fabrication de dispositif électronique peut comprendre un verrou de charge disposé à l'intérieur du volume intérieur d'une interface d'usine et un robot d'interface usine disposé à l'intérieur du volume intérieur de l'interface usine. Le robot d'interface usine peut être conçu pour transférer des substrats entre un premier ensemble de supports de substrat et le premier verrou de charge. Le robot d'interface usine peut comprendre une tour verticale, une pluralité de liaisons et un effecteur terminal.</description><language>eng ; fre</language><subject>BASIC ELECTRIC ELEMENTS ; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; HAND TOOLS ; MANIPULATORS ; PERFORMING OPERATIONS ; PORTABLE POWER-DRIVEN TOOLS ; SEMICONDUCTOR DEVICES ; TRANSPORTING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230420&DB=EPODOC&CC=WO&NR=2023064301A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230420&DB=EPODOC&CC=WO&NR=2023064301A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ASSAF, Shay</creatorcontrib><creatorcontrib>HOLEYANNAVAR, Devendra Channappa</creatorcontrib><creatorcontrib>BAUMGARTEN, Douglas B</creatorcontrib><creatorcontrib>REUTER, Paul B</creatorcontrib><creatorcontrib>CONSTANT, Andrew J</creatorcontrib><creatorcontrib>RAMACHANDRAN, Narayanan</creatorcontrib><creatorcontrib>PHILLIPS, David</creatorcontrib><creatorcontrib>NEWMAN, Jacob</creatorcontrib><creatorcontrib>RICE, Michael R</creatorcontrib><creatorcontrib>GOPALAKRISHNA, Srinivas Poshatrahalli</creatorcontrib><creatorcontrib>KOSHTI, Sushant S</creatorcontrib><creatorcontrib>RAMACHANDRAIAH, Arunkumar</creatorcontrib><title>FACTORY INTERFACE ROBOTS USABLE WITH INTEGRATED LOAD LOCKS</title><description>A factory interface for an electronic device manufacturing system can include a load lock disposed within the interior volume of a factory interface and a factory interface robot disposed within the interior volume of the factory interface. The factory interface robot can be configured to transfer substrates between a first set of substrate carriers and the first load lock. The factory interface robot can comprise a vertical tower, a plurality of links, and an end effector.
Une interface usine pour un système de fabrication de dispositif électronique peut comprendre un verrou de charge disposé à l'intérieur du volume intérieur d'une interface d'usine et un robot d'interface usine disposé à l'intérieur du volume intérieur de l'interface usine. Le robot d'interface usine peut être conçu pour transférer des substrats entre un premier ensemble de supports de substrat et le premier verrou de charge. Le robot d'interface usine peut comprendre une tour verticale, une pluralité de liaisons et un effecteur terminal.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CHAMBERS PROVIDED WITH MANIPULATION DEVICES</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>HAND TOOLS</subject><subject>MANIPULATORS</subject><subject>PERFORMING OPERATIONS</subject><subject>PORTABLE POWER-DRIVEN TOOLS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLByc3QO8Q-KVPD0C3ENAnJcFYL8nfxDghVCgx2dfFwVwj1DPMCS7kGOIa4uCj7-jiDC2TuYh4E1LTGnOJUXSnMzKLu5hjh76KYW5MenFhckJqfmpZbEh_sbGRgZG5iZGBsYOhoaE6cKAFlKKdg</recordid><startdate>20230420</startdate><enddate>20230420</enddate><creator>ASSAF, Shay</creator><creator>HOLEYANNAVAR, Devendra Channappa</creator><creator>BAUMGARTEN, Douglas B</creator><creator>REUTER, Paul B</creator><creator>CONSTANT, Andrew J</creator><creator>RAMACHANDRAN, Narayanan</creator><creator>PHILLIPS, David</creator><creator>NEWMAN, Jacob</creator><creator>RICE, Michael R</creator><creator>GOPALAKRISHNA, Srinivas Poshatrahalli</creator><creator>KOSHTI, Sushant S</creator><creator>RAMACHANDRAIAH, Arunkumar</creator><scope>EVB</scope></search><sort><creationdate>20230420</creationdate><title>FACTORY INTERFACE ROBOTS USABLE WITH INTEGRATED LOAD LOCKS</title><author>ASSAF, Shay ; HOLEYANNAVAR, Devendra Channappa ; BAUMGARTEN, Douglas B ; REUTER, Paul B ; CONSTANT, Andrew J ; RAMACHANDRAN, Narayanan ; PHILLIPS, David ; NEWMAN, Jacob ; RICE, Michael R ; GOPALAKRISHNA, Srinivas Poshatrahalli ; KOSHTI, Sushant S ; RAMACHANDRAIAH, Arunkumar</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2023064301A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CHAMBERS PROVIDED WITH MANIPULATION DEVICES</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>HAND TOOLS</topic><topic>MANIPULATORS</topic><topic>PERFORMING OPERATIONS</topic><topic>PORTABLE POWER-DRIVEN TOOLS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>ASSAF, Shay</creatorcontrib><creatorcontrib>HOLEYANNAVAR, Devendra Channappa</creatorcontrib><creatorcontrib>BAUMGARTEN, Douglas B</creatorcontrib><creatorcontrib>REUTER, Paul B</creatorcontrib><creatorcontrib>CONSTANT, Andrew J</creatorcontrib><creatorcontrib>RAMACHANDRAN, Narayanan</creatorcontrib><creatorcontrib>PHILLIPS, David</creatorcontrib><creatorcontrib>NEWMAN, Jacob</creatorcontrib><creatorcontrib>RICE, Michael R</creatorcontrib><creatorcontrib>GOPALAKRISHNA, Srinivas Poshatrahalli</creatorcontrib><creatorcontrib>KOSHTI, Sushant S</creatorcontrib><creatorcontrib>RAMACHANDRAIAH, Arunkumar</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>ASSAF, Shay</au><au>HOLEYANNAVAR, Devendra Channappa</au><au>BAUMGARTEN, Douglas B</au><au>REUTER, Paul B</au><au>CONSTANT, Andrew J</au><au>RAMACHANDRAN, Narayanan</au><au>PHILLIPS, David</au><au>NEWMAN, Jacob</au><au>RICE, Michael R</au><au>GOPALAKRISHNA, Srinivas Poshatrahalli</au><au>KOSHTI, Sushant S</au><au>RAMACHANDRAIAH, Arunkumar</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>FACTORY INTERFACE ROBOTS USABLE WITH INTEGRATED LOAD LOCKS</title><date>2023-04-20</date><risdate>2023</risdate><abstract>A factory interface for an electronic device manufacturing system can include a load lock disposed within the interior volume of a factory interface and a factory interface robot disposed within the interior volume of the factory interface. The factory interface robot can be configured to transfer substrates between a first set of substrate carriers and the first load lock. The factory interface robot can comprise a vertical tower, a plurality of links, and an end effector.
Une interface usine pour un système de fabrication de dispositif électronique peut comprendre un verrou de charge disposé à l'intérieur du volume intérieur d'une interface d'usine et un robot d'interface usine disposé à l'intérieur du volume intérieur de l'interface usine. Le robot d'interface usine peut être conçu pour transférer des substrats entre un premier ensemble de supports de substrat et le premier verrou de charge. Le robot d'interface usine peut comprendre une tour verticale, une pluralité de liaisons et un effecteur terminal.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING |
| title | FACTORY INTERFACE ROBOTS USABLE WITH INTEGRATED LOAD LOCKS |
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