METHODS OF DETERMINING ABERRATIONS OF A CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM SYSTEM

A method of determining aberrations of a charged particle beam (11) focused by a focusing lens (120) toward a sample (10) in a charged particle beam system is described. The method includes: (a) taking one or more images of the sample at one or more defocus settings to provide one or more taken imag...

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Bibliographische Detailangaben

Hauptverfasser:	EHBERGER, Dominik, FIRNKES, Matthias, BREUER, John
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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