MOLECULAR BEAM EVAPORATION SOURCE (EFFUSION CELL) FOR VACUUM THIN-FILM DEPOSITION

A molecular beam evaporation source (effusion cell) for vacuum thin-film deposition is disclosed. The effusion cell for vacuum thin-film deposition according to the present invention comprises: a crucible in which an evaporable material is held and which has a hollow-shaped support; and a heating wire which is installed to be inserted into the support and generates heat for evaporating the evaporable material held in the crucible, wherein the support comprises a plurality of support parts along the circumference of the crucible, and the heating wire is inserted into at least one of the support parts. La divulgation concerne une source d'évaporation de faisceau moléculaire (cellule d'effusion) pour un dépôt de film mince sous vide. La cellule d'effusion pour dépôt de film mince sous vide selon la présente invention comprend : un creuset dans lequel un matériau évaporable est maintenu et qui possède un support en forme de creux ; et un fil chauffant qui est installé pour être inséré dans le support et qui génère de la chaleur pour évaporer le matériau évaporable contenu dans le creuset, le support comprenant une pluralité de parties de support le long de la circonférence du creuset, et le fil chauffant étant inséré dans au moins l'une des parties de support. 진공 박막 증착용 분자빔 증발원이 개시된다. 본 발명에 따른 진공 박막 증착용 분자빔 증발원은, 증발 물질이 담기며, 중공 형태의 지지부를 갖는 도가니 및 지지부의 내부에 삽입 설치되며 도가니에 담긴 증발 물질을 증발시키는 열을 발생시키는 열선을 포함하며, 지지부는 도가니의 둘레를 따라 복수 개로 마련되고, 적어도 하나의 지지부에는 열선이 삽입된다.