PROCESS FLUID PATH SWITCHING IN RECIPE OPERATIONS

A method includes identifying time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates; translating each time value to a recipe parameter for execution of an operation of a processing recipe; and causing th...

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Bibliographische Detailangaben

Hauptverfasser:	NEEMA, Chahal, BARYSHNIKOV, Anton, KRIL, Thorsten, STANDISH, Peter, SANGHVI, Mitesh, JAMAKHANDI, Vishal Suresh, KANGUDE, Abhijit Ashok, SHANKARAMURTHY, Venkatanarayana
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PHYSICS REGULATING SEMICONDUCTOR DEVICES SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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