ARC LAMP WITH FORMING GAS FOR THERMAL PROCESSING SYSTEMS

Apparatus, systems, and methods for processing workpieces are provided. An arc lamp can include a tube. The arc lamp can include one or more inlets configured to receive water to be circulated through the arc lamp during operation as a water wall, the water wall configured to cool the arc lamp. The...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BREMENSDORFER, Rolf, CAMM, Dave, MA, Shawming, CIBERE, Joseph, HEZLER, Dieter, YANG, Yun, YANG, Michael X
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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