POWER SUPPLY APPARATUS, SYSTEM, EXPOSURE APPARATUS, AND ARTICLE PRODUCTION METHOD

A power supply apparatus according to the present invention has a plurality of power supply terminals for supplying power to a plurality of units. The units each include: a power reception unit that receives power supply from any of the plurality of power supply terminals; a device that, without rec...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	MOTEGI, Yasuhiro
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTINGELECTRIC POWER CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRICITY GENERATION SYSTEMS FOR STORING ELECTRIC ENERGY
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