AN ASSEMBLY AND METHOD OF HANDLING WAFERS

According to the present invention there is provided an assembly which comprises, at least a first and second wafer holder each of which can hold a wafer which comprises semiconductor components; a carrier which is selectively operable carry one of said wafer holders to move said wafer holder; an pi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	COSTE, Damien, OBERLI, Marco, SCARPELLA, Massimo, DROMARD, Pascal
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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