DARK FIELD ILLUMINATION BASED ON LASER ILLUMINATED PHOSPHOR
A system, an illumination module of the system, and a method for operating the illumination module, that uses a phosphor illuminated by a laser diode to create a dark field illumination module for wafer inspection and defect detection, having at least one laser diode array combined to illuminate the...
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| creator | MENA, Amnon BEN-EZER, Zehava WEISSLER, Yuval |
| description | A system, an illumination module of the system, and a method for operating the illumination module, that uses a phosphor illuminated by a laser diode to create a dark field illumination module for wafer inspection and defect detection, having at least one laser diode array combined to illuminate the same spot at desired spot size over a phosphor material with desired characteristics.
L'invention concerne système d'éclairage, un module d'éclairage et un procédé pour faire fonctionner le module d'éclairage qui utilise un luminophore éclairé par une diode laser de manière à créer un module d'éclairage de champ noir pour l'inspection de tranches et la détection de défauts qui possède au moins un réseau de diodes laser combinés pour éclairer le même point à une taille de points désirée par-dessus un matériau de luminophore avec des caractéristiques désirées. |
| format | Patent |
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L'invention concerne système d'éclairage, un module d'éclairage et un procédé pour faire fonctionner le module d'éclairage qui utilise un luminophore éclairé par une diode laser de manière à créer un module d'éclairage de champ noir pour l'inspection de tranches et la détection de défauts qui possède au moins un réseau de diodes laser combinés pour éclairer le même point à une taille de points désirée par-dessus un matériau de luminophore avec des caractéristiques désirées.</description><language>eng ; fre</language><subject>BLASTING ; HEATING ; LIGHT SOURCES NOT OTHERWISE PROVIDED FOR ; LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL ; LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE ; LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATINGELEMENTS ; LIGHTING ; MECHANICAL ENGINEERING ; NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE ; NON-PORTABLE LIGHTING DEVICES ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PHYSICS ; SYSTEMS THEREOF ; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLEEXTERIORS ; WEAPONS</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220428&DB=EPODOC&CC=WO&NR=2022084867A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220428&DB=EPODOC&CC=WO&NR=2022084867A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>MENA, Amnon</creatorcontrib><creatorcontrib>BEN-EZER, Zehava</creatorcontrib><creatorcontrib>WEISSLER, Yuval</creatorcontrib><title>DARK FIELD ILLUMINATION BASED ON LASER ILLUMINATED PHOSPHOR</title><description>A system, an illumination module of the system, and a method for operating the illumination module, that uses a phosphor illuminated by a laser diode to create a dark field illumination module for wafer inspection and defect detection, having at least one laser diode array combined to illuminate the same spot at desired spot size over a phosphor material with desired characteristics.
L'invention concerne système d'éclairage, un module d'éclairage et un procédé pour faire fonctionner le module d'éclairage qui utilise un luminophore éclairé par une diode laser de manière à créer un module d'éclairage de champ noir pour l'inspection de tranches et la détection de défauts qui possède au moins un réseau de diodes laser combinés pour éclairer le même point à une taille de points désirée par-dessus un matériau de luminophore avec des caractéristiques désirées.</description><subject>BLASTING</subject><subject>HEATING</subject><subject>LIGHT SOURCES NOT OTHERWISE PROVIDED FOR</subject><subject>LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL</subject><subject>LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE</subject><subject>LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATINGELEMENTS</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE</subject><subject>NON-PORTABLE LIGHTING DEVICES</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>PHYSICS</subject><subject>SYSTEMS THEREOF</subject><subject>VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLEEXTERIORS</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLB2cQzyVnDzdPVxUfD08Qn19fRzDPH091Nwcgx2dVEAMnyAjCCEHFAwwMM_GIiDeBhY0xJzilN5oTQ3g7Kba4izh25qQX58anFBYnJqXmpJfLi_kYGRkYGFiYWZuaOhMXGqAHZqKjk</recordid><startdate>20220428</startdate><enddate>20220428</enddate><creator>MENA, Amnon</creator><creator>BEN-EZER, Zehava</creator><creator>WEISSLER, Yuval</creator><scope>EVB</scope></search><sort><creationdate>20220428</creationdate><title>DARK FIELD ILLUMINATION BASED ON LASER ILLUMINATED PHOSPHOR</title><author>MENA, Amnon ; BEN-EZER, Zehava ; WEISSLER, Yuval</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2022084867A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2022</creationdate><topic>BLASTING</topic><topic>HEATING</topic><topic>LIGHT SOURCES NOT OTHERWISE PROVIDED FOR</topic><topic>LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL</topic><topic>LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE</topic><topic>LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATINGELEMENTS</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE</topic><topic>NON-PORTABLE LIGHTING DEVICES</topic><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>PHYSICS</topic><topic>SYSTEMS THEREOF</topic><topic>VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLEEXTERIORS</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>MENA, Amnon</creatorcontrib><creatorcontrib>BEN-EZER, Zehava</creatorcontrib><creatorcontrib>WEISSLER, Yuval</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>MENA, Amnon</au><au>BEN-EZER, Zehava</au><au>WEISSLER, Yuval</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>DARK FIELD ILLUMINATION BASED ON LASER ILLUMINATED PHOSPHOR</title><date>2022-04-28</date><risdate>2022</risdate><abstract>A system, an illumination module of the system, and a method for operating the illumination module, that uses a phosphor illuminated by a laser diode to create a dark field illumination module for wafer inspection and defect detection, having at least one laser diode array combined to illuminate the same spot at desired spot size over a phosphor material with desired characteristics.
L'invention concerne système d'éclairage, un module d'éclairage et un procédé pour faire fonctionner le module d'éclairage qui utilise un luminophore éclairé par une diode laser de manière à créer un module d'éclairage de champ noir pour l'inspection de tranches et la détection de défauts qui possède au moins un réseau de diodes laser combinés pour éclairer le même point à une taille de points désirée par-dessus un matériau de luminophore avec des caractéristiques désirées.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre |
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| subjects | BLASTING HEATING LIGHT SOURCES NOT OTHERWISE PROVIDED FOR LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATINGELEMENTS LIGHTING MECHANICAL ENGINEERING NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE NON-PORTABLE LIGHTING DEVICES OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SYSTEMS THEREOF VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLEEXTERIORS WEAPONS |
| title | DARK FIELD ILLUMINATION BASED ON LASER ILLUMINATED PHOSPHOR |
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