CAPACITIVE SENSOR FOR CHAMBER CONDITION MONITORING

Embodiments disclosed herein comprise a sensor. In an embodiment, the sensor comprises a substrate having a first surface and a second surface opposite from the first surface. In an embodiment, the sensor further comprises a first electrode over the first surface of the substrate, and a second elect...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MCCORMICK, Daniel Thomas, LI, Xiaopu, BERA, Kallol, WILLWERTH, Michael D, SALY, Mark Joseph, TAE, Patrick John, KRAUS, Philip Allan, HICKS, Albert Barrett, PAN, Yaoling, ENMAN, Lisa J, TEDESCHI, Leonard, SUN, Jennifer
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES
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