DRIVING CIRCUITS FOR A PIEZOELECTRIC MICROELECTROMECHANICAL SYSTEM MIRROR

According to an example aspect of the present invention, there is provided a Microelectromechanical System, MEMS, mirror apparatus, comprising a MEMS mirror and at least two piezo actuators, wherein the at least two piezo actuators are connected to each other and configured to control, or controllin...

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Bibliographische Detailangaben

1. Verfasser:	PERNU, Tapio
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	ELECTRICITY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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