MEMBER FOR SEMICONDUCTOR CLEANING APPARATUS

Provided is a member for a semiconductor cleaning apparatus, the member being less likely to be thermally deformed and cause metal to be eluted therefrom. The member for a semiconductor cleaning apparatus includes a prepreg in which a carbon fiber and a tetrafluoroethylene/perfluoro (alkyl vinyl eth...

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Bibliographische Detailangaben
Hauptverfasser:	HAGI, Keisuke, YUKAWA, Hirokazu, MURAKAMI, Shinji, MASUI, Toshiaki
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	Provided is a member for a semiconductor cleaning apparatus, the member being less likely to be thermally deformed and cause metal to be eluted therefrom. The member for a semiconductor cleaning apparatus includes a prepreg in which a carbon fiber and a tetrafluoroethylene/perfluoro (alkyl vinyl ether) copolymer are thermally fused. L'invention fournit un élément pour dispositif de nettoyage de semi-conducteurs qui présente peu de risques de déformation thermique ainsi que d'élution de métal. Plus précisément, l'invention concerne un élément pour dispositif de nettoyage de semi-conducteurs qui contient un pré-imprégné dans lequel des fibres de carbone et un copolymère de tétrafluoroéthylène et perfluoro (alkle vinyle éther) sont thermoscellés. 熱変形しにくく、金属が溶出しにくい半導体洗浄装置用部材を提供する。炭素繊維とテトラフルオロエチレン／パーフルオロ（アルキルビニルエーテル）共重合体とが熱融着したプリプレグを含む半導体洗浄装置用部材である。