HIGH-PRESSURE BUFFER STRUCTURE WITH REACTION BIN OF COATING MACHINE

Provided is a high-pressure buffer structure with a reaction bin of a coating machine, the high-pressure buffer structure comprising a closed reaction bin (1). A vacuum extraction pipeline and a high-pressure gas supply pipeline are connected to the reaction bin (1), a gas inlet (2) of the high-pres...

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Bibliographische Detailangaben
Hauptverfasser: POON, Wai Han, AU, Kit Ho Alfred
Format: Patent
Sprache:chi ; eng ; fre
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