CHARGE NEUTRALIZING APPARATUS
This invention relates to a charge neutralizing apparatus for a processing chamber of an ion implantation device. La présente invention concerne un appareil de neutralisation de charge pour une chambre de traitement d'un dispositif d'implantation ionique.
Gespeichert in:
| Hauptverfasser: | , , |
|---|---|
| Format: | Patent |
| Sprache: | eng ; fre |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | JACQUES, Amory FERNANDES, José NAVET, Benjamine |
| description | This invention relates to a charge neutralizing apparatus for a processing chamber of an ion implantation device.
La présente invention concerne un appareil de neutralisation de charge pour une chambre de traitement d'un dispositif d'implantation ionique. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_WO2020178068A9</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>WO2020178068A9</sourcerecordid><originalsourceid>FETCH-epo_espacenet_WO2020178068A93</originalsourceid><addsrcrecordid>eNrjZJB19nAMcndV8HMNDQly9PGM8vRzV3AMCHAMcgwJDeZhYE1LzClO5YXS3AzKbq4hzh66qQX58anFBYnJqXmpJfHh_kYGRgaG5hYGZhaOlsbEqQIAKJIiPw</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>CHARGE NEUTRALIZING APPARATUS</title><source>esp@cenet</source><creator>JACQUES, Amory ; FERNANDES, José ; NAVET, Benjamine</creator><creatorcontrib>JACQUES, Amory ; FERNANDES, José ; NAVET, Benjamine</creatorcontrib><description>This invention relates to a charge neutralizing apparatus for a processing chamber of an ion implantation device.
La présente invention concerne un appareil de neutralisation de charge pour une chambre de traitement d'un dispositif d'implantation ionique.</description><language>eng ; fre</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210701&DB=EPODOC&CC=WO&NR=2020178068A9$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210701&DB=EPODOC&CC=WO&NR=2020178068A9$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>JACQUES, Amory</creatorcontrib><creatorcontrib>FERNANDES, José</creatorcontrib><creatorcontrib>NAVET, Benjamine</creatorcontrib><title>CHARGE NEUTRALIZING APPARATUS</title><description>This invention relates to a charge neutralizing apparatus for a processing chamber of an ion implantation device.
La présente invention concerne un appareil de neutralisation de charge pour une chambre de traitement d'un dispositif d'implantation ionique.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJB19nAMcndV8HMNDQly9PGM8vRzV3AMCHAMcgwJDeZhYE1LzClO5YXS3AzKbq4hzh66qQX58anFBYnJqXmpJfHh_kYGRgaG5hYGZhaOlsbEqQIAKJIiPw</recordid><startdate>20210701</startdate><enddate>20210701</enddate><creator>JACQUES, Amory</creator><creator>FERNANDES, José</creator><creator>NAVET, Benjamine</creator><scope>EVB</scope></search><sort><creationdate>20210701</creationdate><title>CHARGE NEUTRALIZING APPARATUS</title><author>JACQUES, Amory ; FERNANDES, José ; NAVET, Benjamine</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2020178068A93</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2021</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><toplevel>online_resources</toplevel><creatorcontrib>JACQUES, Amory</creatorcontrib><creatorcontrib>FERNANDES, José</creatorcontrib><creatorcontrib>NAVET, Benjamine</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>JACQUES, Amory</au><au>FERNANDES, José</au><au>NAVET, Benjamine</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>CHARGE NEUTRALIZING APPARATUS</title><date>2021-07-01</date><risdate>2021</risdate><abstract>This invention relates to a charge neutralizing apparatus for a processing chamber of an ion implantation device.
La présente invention concerne un appareil de neutralisation de charge pour une chambre de traitement d'un dispositif d'implantation ionique.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng ; fre |
| recordid | cdi_epo_espacenet_WO2020178068A9 |
| source | esp@cenet |
| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY |
| title | CHARGE NEUTRALIZING APPARATUS |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-03T19%3A23%3A05IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=JACQUES,%20Amory&rft.date=2021-07-01&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EWO2020178068A9%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |