METHOD OF MANUFACTURING A MEMRISTOR HAVING AN ELECTRIC FIELD NANO-CONCENTRATOR

A layer of tantalum oxide and a layer of yttrium-stabilized zirconium dioxide are sequentially formed using magnetron sputtering on the surface of one electrode, said electrode being made of titanium nitride. As tantalum oxide is deposited on said electrode, nitrogen atoms are partially substituted...

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Bibliographische Detailangaben

Hauptverfasser:	PAVLOV, Dmitry Alekseevich, TETELBAUM, David Isaakovich, GORSHKOV, Oleg Nikolaevich, MIKHAILOV, Alexey Nikolaevich, SHARAPOV, Alexander Nikolaevich, BELOV, Alexey Ivanovich, ZUBKOV, Sergey Yurievich, ANTONOV, Ivan Nikolaevich, SUSHKOV, Artem Aleksandrovich, KOROLEV, Dmitry Sergeevich
Format:	Patent
Sprache:	eng ; fre ; rus
Schlagworte:	ELECTRICITY
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