CHROMATIC CONFOCAL AREA SENSOR

3D measurements of features on a workpiece, such as ball height, co-planarity, component thickness, or warpage, are determined. The system includes a broadband light source, a microlens array, a tunable color filter, a lens system, and a detector. The microlens array can focus a light beam to a poin...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WOUTERS, Christophe, DE GREEVE, Johan, JORIS, Kristof
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
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