PRE-CONDITIONED CHAMBER COMPONENTS

Embodiments of the disclosure generally relate to a process kit including a shield serving as an anode in a physical deposition chamber. The shield has a cylindrical band, the cylindrical band having a top and a bottom, the cylindrical band sized to encircle a sputtering surface of a sputtering targ...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUN, Lizhong, WEST, Brian T, LU, William M
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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