MASS FLOW CONTROLLER WITH ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER

An example mass flow controller comprises a flow pathway comprising a first cavity and a second cavity, a laminar flow element and a pressure transducer assembly comprising an absolute pressure transducer exposed to absolute pressure in the third cavity in fluid communication with the first cavity,...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KEHOE, Anthony, BANARES, Berwin, LULL, John
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CONTROLLING MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TESTING
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