APPARATUS AND METHOD FOR IMPROVED ION BEAM CURRENT

An apparatus may include an electrode system, the electrode system comprising a plurality of electrodes to guide an ion beam from an entrance aperture to an exit aperture, and a voltage supply to apply a plurality of voltages to the electrode system. The electrode system may comprise an exit electro...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LAYNE, Philip, CHANG, Shengwu, LIKHANSKII, Alexandre, SINCLAIR, Frank
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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