EVALUATING QUALITY OF A PRODUCT SUCH AS A SEMICONDUCTOR SUBSTRATE

An evaluation device (10) may be provided for evaluating quality of a semiconductor substrate manufactured by a semiconductor substrate manufacturing apparatus (40). The evaluation device (10) may comprising: a receiving unit (100) configured to receive an image of the semiconductor substrate, the i...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUGAHARA, Hiroshi, ANDO, Tanichi
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CALCULATING COMPUTING COUNTING PHYSICS
Online-Zugang:	Volltext bestellen
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