STRUCTURE, METHOD FOR MANUFACTURING SAME, SEMICONDUCTOR ELEMENT, AND ELECTRONIC CIRCUIT

This structure includes: a metal oxide semiconductor layer; and a noble metal oxide layer, wherein the metal oxide semiconductor layer and the noble metal oxide layer are adjacent to each other, and the film thickness of the noble metal oxide layer is over 10 nm. La présente invention concerne une s...

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Hauptverfasser: UEOKA, Yoshihiro, NAGASAKI, Yoshikazu, KAWASHIMA, Emi, TSURUMA, Yuki, SEKIYA, Takashi
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creator UEOKA, Yoshihiro
NAGASAKI, Yoshikazu
KAWASHIMA, Emi
TSURUMA, Yuki
SEKIYA, Takashi
description This structure includes: a metal oxide semiconductor layer; and a noble metal oxide layer, wherein the metal oxide semiconductor layer and the noble metal oxide layer are adjacent to each other, and the film thickness of the noble metal oxide layer is over 10 nm. La présente invention concerne une structure comprenant : une couche semi-conductrice d'oxyde métallique ; et une couche d'oxyde de métal noble, la couche semi-conductrice d'oxyde métallique et la couche d'oxyde de métal noble étant adjacentes l'une à l'autre, et l'épaisseur de film de la couche d'oxyde de métal noble étant supérieure à 10 nm. 金属酸化物半導体層と、貴金属酸化物層と、を含み、前記金属酸化物半導体層及び前記貴金属酸化物層は隣接し、前記貴金属酸化物層の膜厚が10nm超である構造物。
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title STRUCTURE, METHOD FOR MANUFACTURING SAME, SEMICONDUCTOR ELEMENT, AND ELECTRONIC CIRCUIT
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