SYSTEMS, METHODS AND DEVICES FOR ETCHING CONTROL

Layers of materials enriched with chemical isotopes can delineate boundaries between materials in a semiconductor process. During an etch process, these boundary layers are removed by chemical reactions, giving rise to volatile reaction products. By using a mass spectrometer attached to the etch cha...

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Bibliographische Detailangaben

Hauptverfasser:	SHYKIND, David, TUFTS, Bruce J, MCINTYRE, Brian J
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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