METHODS AND SYSTEMS FOR OPTICAL FUNCTIONALISATION OF A SAMPLE MADE OF SEMICONDUCTOR MATERIAL

One aspect of the invention relates to a system (100) for optical functionalisation at different depths of a sample (10) made of semiconductor material, comprising: - a source (20) for emitting a laser beam formed of pulses having effective durations between 1 ps and 100 ns, having a wavelength in t...

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Bibliographische Detailangaben

Hauptverfasser:	GROJO, David, CHAMBONNEAU, Maxime
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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