TRANSFER DEVICE, TRANSFER METHOD, AND INSPECTION SYSTEM

The present invention has: a loader (31); a transfer path (50), which moves the loader (31) in the X direction, and which has a plurality of transfer positions for transferring a wafer W; a belt-driven drive mechanism (32) that moves the loader (31) along the transfer path (50) by means of a timing...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	UCHIDA Minoru, OBIKANE Tadashi
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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