EXTRACTION BODY FOR LITHOGRAPHIC APPARATUS

An extraction body (67) is for a support apparatus (WT) of a lithographic apparatus. The support apparatus is configured to support an object (W). The extraction body is formed with an opening (91) at a surface (69) thereof. The opening extends within the extraction body forming a first passageway (...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WATERSON, Nicholas, Peter, RAVENSBERGEN, Simon, Karel, HOUBEN, Martijn, KRAMER, Gijs, ROSET, Niek, Jacobus, Johannes, CLOOSTERMAN, Vincentius, Fransiscus, BALTIS, Coen, Hubertus, Matheus, VAN DE VIJVER, Yuri, Johannes, Gabriël, TROMP, Siegfried, Alexander, GERRITZEN, Justin, Johannes, Hermanus, LAURENT, Thibault, Simon, Mathieu, VERMEULEN, Marcus, Martinus, Petrus, Adrianus
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!