METHOD FOR ANALYZING THREE-DIMENSIONAL SPECIMEN

The present invention relates to a method for analyzing a three-dimensional specimen, the method comprising: a component measurement step for measuring components constituting a three-dimensional specimen by identifying an energy spectrum generated when an ion beam incident to the three-dimensional...

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Bibliographische Detailangaben
Hauptverfasser:	KIM, Seung Gyun, AN, Sung Yup, KIM, Jwa Soon, SIM, Chang Sik, KIM, Soo Bang, PARK, Kyung Su, YU, Kyu Sang, JUNG, Kwang Hwan, MIN, Won Ja, KIM, Wan Sup
Format:	Patent
Sprache:	eng ; fre ; kor
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	The present invention relates to a method for analyzing a three-dimensional specimen, the method comprising: a component measurement step for measuring components constituting a three-dimensional specimen by identifying an energy spectrum generated when an ion beam incident to the three-dimensional specimen collides with the three-dimensional specimen. La présente invention concerne un procédé qui permet d'analyser un échantillon tridimensionnel et qui comprend une étape de mesure de composé consistant à mesurer des composé constituant un échantillon tridimensionnel par identification d'un spectre d'énergie généré lorsqu'un faisceau d'ions incident sur l'échantillon tridimensionnel entre en collision avec l'échantillon tridimensionnel. 본 발명은 입체 시편을 분석하는 방법에 관한 것으로, 입체 시편에 입사시킨 이온빔이 입체 시편과 충돌함에 따라 발생되는 에너지 스펙트럼을 확인함으로써, 입체 시편을 구성하는 성분을 측정하는 성분측정단계를 포함한다.