REFLECTIVE OPTICAL ELEMENT

An optical element comprises a body and at least one reflective surface provided on the body for receiving a radiation beam so as to form a beam spot region and a reflected radiation beam, wherein the body is generally disc-shaped and is configured to be moved by a movement mechanism such that the b...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RENKENS, Michael, Jozef, Mathijs, DONKER, Rilpho, Ludovicus, NIENHUYS, Han-Kwang
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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