MEMS-BASED ACTIVE COOLING SYSTEM

In various embodiments, a cooling device for dissipating heat generated in an electronic or electrochemical device includes a substrate, multiple benders arranged on the substrate, and supply circuitry for supplying an electric field to actuate the benders for causing movement thereof, thereby produ...

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Hauptverfasser: FINE, ERAN, SHACHAM-DIAMAND, YOSI, KRYLOV, VIACHESLAV, AXELROD, EKATERINA, BEN-DAVID, MORDECHAI, HERMON, ZIV
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creator FINE, ERAN
SHACHAM-DIAMAND, YOSI
KRYLOV, VIACHESLAV
AXELROD, EKATERINA
BEN-DAVID, MORDECHAI
HERMON, ZIV
description In various embodiments, a cooling device for dissipating heat generated in an electronic or electrochemical device includes a substrate, multiple benders arranged on the substrate, and supply circuitry for supplying an electric field to actuate the benders for causing movement thereof, thereby producing an air flow. Dans divers modes de réalisation, un dispositif de refroidissement pour dissiper la chaleur générée dans un dispositif électronique ou électrochimique comprend un substrat, de multiples éléments fléchisseurs prévus sur le substrat, et une circuiterie d'alimentation pour fournir un champ électrique pour actionner les éléments fléchisseurs afin d'en provoquer le mouvement, ce qui permet ainsi de produire un flux d'air.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
SEMICONDUCTOR DEVICES
TRANSPORTING
title MEMS-BASED ACTIVE COOLING SYSTEM
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