POSITIONING DEVICE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

A method of applying a plurality of forces to a physical component in response to an external force being applied to the physical component, wherein: - each respective one of the plurality of forces is being applied at a respective one of a plurality of predetermined different locations at the physi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VAN DE WAL, MARINUS, MARIA, JOHANNES, DIRKX, NIC, JASPER, SIMONS, WILHELMUS, FRANCISCUS, JOHANNES, AANGENENT, WILHELMUS, HENRICUS, THEODORUS, MARIA
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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