NEUTRAL ATOM OR MOLECULE DETECTOR

A probe (28), as used in a scanning neutral helium microscope, for detecting neutral particles originating from a beam (20) of neutral particles directed at a target location (21) of a sample (22) and subsequently scattered at the target location (21) is disclosed. The probe (28) has a direction fil...

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1. Verfasser: BALTZER, PETER
Format: Patent
Sprache:eng ; fre
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