OBJECT POSITIONING SYSTEM, CONTROL SYSTEM, LITHOGRAPHIC APPARATUS, OBJECT POSITIONING METHOD AND DEVICE MANUFACTURING METHOD

The invention relates to an object positioning system comprising a movable object, an actuator system and a control system. The moveable object is moveable relative to a reference. The actuator system is configured to apply a force to the object at a force application location on the object in order...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DIRKX, NIC, SIMONS, WILHELMUS, FRANCISCUS, JOHANNES, BUTLER, HANS, KAMIDI, RAMIDIN, AANGENENT, WILHELMUS, HENRICUS, THEODORUS, MARIA
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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