EMS DEVICE HAVING A NON-ELECTRICALLY ACTIVE ABSORBER

This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having a non-electrically active absorber. In one aspect, the EMS device includes a stationary electrode over a substrate, a dielectric layer over the stationary electrode, an absorber over the diel...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HONG, BRANDON JOHN, PAN, YAOLING, LAVERY, KRISTOPHER ANDREW, HONG, JOHN HYUNCHUL, CHANG, TALLIS YOUNG, CHAN, EDWARD KEAT LEEM, WEN, BING, MA, JIAN JIM, KIM, CHEONHONG
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
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