VTFT WITH POLYMER CORE

A transistor includes a polymeric material post on a substrate. An inorganic material cap, covering the post, extends beyond an edge of the post to define a reentrant profile. A conformal conductive material gate layer is over the edge of the post in the reentrant profile. A conformal insulating mat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ELLINGER, CAROLYN, R, NELSON, SHELBY, F
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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