SENSING OF MIRROR POSITION USING THE FRINGING OF ELECTRIC FIELDS

Mechanical apparatus (20, 60) includes a base (22) and a moving element (24), which is mounted to rotate about an axis relative to the base. A capacitive rotation sensor includes at least one first electrode (34, 38, 66) disposed on the moving element in a location adjacent to the base and at least...

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Bibliographische Detailangaben

1. Verfasser:	ERLICH, RAVIV
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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