SYSTEM FOR POSITIONING AN OBJECT IN LITHOGRAPHY

The invention relates to a lithographic apparatus comprising: - an object (OB) that is moveable in at least one direction (X, Y); - a control system to move the object in the at least one direction, wherein the control system is arranged to control movement of the object in the at least one directio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KEMPER, NICOLAAS, RUDOLF, VAN DER MEULEN, FRITS, HEMPENIUS, PETER, PAUL, RIJS, ROBERTUS, MATHIJS, GERARDUS, DE VOS, YOUSSEF, KAREL, MARIA, DE WIT, PAUL, CORNÉ, HENRI, HOUBEN, MARTIJN, BOERE, STIJN, WILLEM
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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