SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

A support table (WT) to support a surface of a substrate (W), wherein the support table comprises: a base surface (22) substantially parallel to the surface of the substrate, a plurality of burls (20) protruding above the base surface, each of the burls having a respective distal end and a first hei...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VAN ABEELEN, HENDRIKUS, JOHANNES, MARINUS, VAN DEN HEUVEL, MARCO, ADRIANUS, PETER, DE KOCK, ALWIN, HOUBEN, MARTIJN
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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