ION MILLING DEVICE

The present invention relates to an ion milling device that conducts processing by irradiating a sample with an ion beam, an objective of the current invention being to provide an ion milling device that is capable of highly precisely controlling the temperature of a sample regardless of deformation...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KANEKO ASAKO, TAKASU HISAYUKI, KONOMI MAMI, IWAYA TORU, MUTOU HIROBUMI
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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