COPPER-ALLOY BARRIER LAYERS AND CAPPING LAYERS FOR METALLIZATION IN ELECTRONIC DEVICES

In various embodiments, electronic devices such as thin-film transistors and/or touch-panel displays incorporate electrodes and/or interconnects featuring a conductor layer and, disposed above or below the conductor layer, a capping layer and/or a barrier layer comprising an alloy of Cu and one or m...

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Bibliographische Detailangaben
Hauptverfasser: FRANCOISARLES, DARY, HOGAN, PATRICK, ZHANG, QI, ABOUAF, MARC, SUN, SHUWEI
Format: Patent
Sprache:eng ; fre
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